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1. Identificação
Tipo de ReferênciaArtigo em Evento (Conference Proceedings)
Sitemtc-m21c.sid.inpe.br
Código do Detentorisadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S
Identificador8JMKD3MGP3W34R/3TC2MQP
Repositóriosid.inpe.br/mtc-m21c/2019/05.24.14.14
Repositório de Metadadossid.inpe.br/mtc-m21c/2019/05.24.14.14.31
Última Atualização dos Metadados2020:01.06.11.42.14 (UTC) administrator
Chave SecundáriaINPE--PRE/
Chave de CitaçãoMitmaPillacaTravRami:2019:DeDiCa
TítuloDeposition of diamond-like carbon films on interior surface of a metallic tube with high aspect ratio
Ano2019
Data de Acesso10 maio 2024
Tipo SecundárioPRE CI
2. Contextualização
Autor1 Mitma Pillaca, Elver Juan de Dios
2 Trava-Airoldi, Vladimir Jesus
3 Ramirez, M.
Grupo1 LABAS-COCTE-INPE-MCTIC-GOV-BR
2 LABAS-COCTE-INPE-MCTIC-GOV-BR
Afiliação1 Instituto Nacional de Pesquisas Espaciais (INPE)
2 Instituto Nacional de Pesquisas Espaciais (INPE)
3 Universidade do Vale do Paraíba (UNIVAP)
Endereço de e-Mail do Autor1 elver.mitma@inpe.br
2 vladimir.airoldi@inpe.br
Nome do EventoInternational Conference on Metallurgical Coatings and Thin Films (ICMCTF), 46
Localização do EventoSan Diego, CA
Data19-24 May
Histórico (UTC)2019-05-24 14:18:33 :: simone -> administrator :: 2019
2020-01-06 11:42:14 :: administrator -> simone :: 2019
3. Conteúdo e estrutura
É a matriz ou uma cópia?é a matriz
Estágio do Conteúdoconcluido
Transferível1
Tipo do ConteúdoExternal Contribution
ResumoRecently, we have studied the growth of DLC film on the inner surface of a stainless steel AISI 304 tube with high aspect ratio (length/diameter = 20) by using the Plasma Enhanced Chemical Vapor Deposition (PECVD) technique. In this configuration, a tube with 200 cm in length and 10 cm in diameter was used as a reator. The inlet and the pumping of the gas is performed by both side of the tube-ends. Thus, in the present work are reports the results about the effect of the pulse width on the plasma discharge and on the adherence of DLC film. The coating was performed by using the pulsed-DC PECVD technique and the acetylene gas, as precursor. Five samples of AISI 304 were distributed longitudinally on the tube inner for the film growth and subsequent characterization. The system was pumped down to a base pressure of 10-4 Torr by a set of mechanical and diffusion pump. The working pressure was kept constant at aproximately 3 mTorr in all the experiments. The voltage was kept at 1 kV (SiH4 plasma) and at 0.7 kV (Ar and C2H2 plasma). The repetition rate was 21 kHz whereas the pulse width was varied from 5 to 20 µs. Various results were obtained: (a) high voltages can be applied by using lower pulse width; (b) the confinament of the plasma is affected; (c) the temperature on the tube surface was reduced significantly during the plasma discharge; (d) amorphous carbon hydrogenated (a-C:H) films with a remarkable improvement on the adherence of the DLC film were obtained. Results of Raman scattering spectroscopy have shown dependence of structure and quality of the DLC film with the longitudinal distribution.
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6. Notas
Campos Vaziosarchivingpolicy archivist booktitle callnumber copyholder copyright creatorhistory descriptionlevel dissemination doi e-mailaddress edition editor format isbn issn keywords label lineage mark mirrorrepository nextedition notes numberoffiles numberofvolumes orcid organization pages parameterlist parentrepositories previousedition previouslowerunit progress project publisher publisheraddress readpermission resumeid rightsholder schedulinginformation secondarydate secondarymark serieseditor session shorttitle size sponsor subject targetfile tertiarymark tertiarytype type url versiontype volume
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